Whether it is 99.5% or 99.99% alumina, sapphire, aluminum nitride, silicon carbide or silicon nitride, Kyocera's advanced ceramic materials offer superior wear and corrosion resistance, excellent plasma durability, high rigidity, no metal contamination and superb electrical and thermal properties.
Kyocera's SPE products such as wafer polishing plates, electro-static chucks, end effectors, heaters, insulators, and chamber components are manufactured to our customer's individual specifications, from one piece prototype orders to high volume production quantities.
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