Ultrasonic Motor X-Y Stage
Selected as one of the winners of the "42 Annual 10 Outstanding New Products Award" for 1999.
Material: Alumina
Applications: Lithography, Wafer Inspection, Ion Beam Defect Correction and Scanning Electron Microscope
Features:
- High Accuracy
Positioning of +/- 1 micron is achieved by using a high purity, rigid, alumina material with a low thermal expansion coefficient in combination with an ultrasonic linear motor for the drive system.
- Small Size
By utilizing a non-magnetic ultrasonic motor, Kyocera has been able to reduce the size of the stage by 50% compared to past servo motor drive stages.
- High Speed Drive
500mm/sec and continuously improving
- Low Vibration
0.1g or less is possible
- Non-Magnetic
All materials used are non-magnetic
- Vacuum Compatibility
10-6 Torr is Possible
Specifications:
- Stroke: 300mm x 300mm
- Maximum Speed: 500mm/sec and continuously improving
- Maximum Acceleration: 0.5G and continuously improving
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