Ceramic Fixtures
Typical Products:
- Transfer Tool
- Ion-Milling and RIE Fixtures
- Conditioning Ring for Polishing Process
- Ultrasonic Bonding Wedge
- Wire Cutter
- Static Dissipative Tweezers
- Gimbal Support Fixture
Ceramic Materials: Static Dissipative Zirconia, Alumina, Zirconia, Silicon Carbide, Al2O3-TiC
Material Characteristics: Kyocera Static Dissipative Materials Compared to SUS
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21H0 Zirconia |
FC112M Forsterite |
Stainless Steel 440 |
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Color |
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Black |
Black |
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Bulk Density |
|
6 |
3.7 |
7.8 |
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Hardness (Hv) |
GPa |
10.8 |
6.5 |
6.4 |
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Flexural Strength |
MPa |
785 |
157 |
519 |
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Young's Modulus |
GPa |
200 |
127 |
206 |
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Coefficient of Thermal Expansion |
X10-6 /°C |
10.8 |
9 |
10.2 |
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Thermal Conductivity |
W/m×k |
4.3 |
3.4 |
26 |
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Volume Resistivity |
Ωcm |
106-9 |
105-6 |
< 10-3 |
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Typical Application |
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Tweezers, Cutters, Transfer Tools, Fixtures |
Disk Spacer |
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Advantages of Advanced Ceramic Materials:
- ESD Safe Materials Available
- Less Contamination
- No Plastic Deformation
- Excellent Chemical Resistance
- High Wear Resistance
- High Flexural Strength
Al203-TiC Substrate | Ceramic Disk Spacer | Ceramic Fixtures
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