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Home > Products > Semiconductor Processing Equipment > Wafer-making
Semiconductor Processing Equipment
Wafer-Making Products

WAFER POLISHING PLATE, TURN TABLE AND CONDITIONING RING

Material: 99.5% Alumina

Size Availability: 12" to 35" in diameter

Features:
  • Surface Flatness: < 1 - 2 microns
  • High Rigidity
  • Excellent Wear Resistance
  • Excellent Flatness Retention Compared to Metal

SiC POLISHING PLATE FOR SINGLE WAFER PROCESSING

Material: Silicon Carbide

Size Availability: 12" in diameter

Profile Availability: Concave, Flat and Convex

Features:
  • Surface Flatness: < 1 micron
  • High Thermal Conductivity
  • Low Thermal Expansion
  • High Rigidity
  • Excellent Wear Resistance
  • The Best Flatness Retention Compared to Metal

 
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